SMC Single Axis Robots

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Main Body, Peripheral Components
Type
Stroke(mm)
Max. Transportable Mass Range (Horizontal)(kg)
Max. Transportable Mass (Horizontal)(kg)
Max. Transportable Mass Range (Vertical)(kg)
Max. Transportable Mass (Vertical)(kg)
Drive Method
Guide
Lead(mm)
Input Power Supply
Position Detection
I/O Module
Table Width W1(mm)
Brake
Max. Thrust Force Range(N)
Max. Thrust Force(N)
Noise Filters
Table Length L1(mm)
Usage Environment
Positioning Repeatability(µm)
Maximum Velocity(mm/sec)

    Electric Actuator Slider Type Ball Screw Drive LEFS Series Step Motor/Servo Motor

      Controller (Step Data Input Type) LECP6 (Step Motor) / LECA6 (Servo Motor) Series

        Step motor controller JXCE1, 91, P1, D1, L1 series

          Electric Actuator Rod Type LEY Series Step Motor/Servo Motor

            Electric actuator rod type motorless specification LEY series

              Electric actuator slider type belt drive LEFB series AC servo motor LECS□

                Programless controller LECP1 series

                  Step motor driver LECPA series

                    Electric actuator slider type ball screw drive LEFS series AC servo motor LECS□

                    • Promotional pricing

                    Electric Actuator, Slider Type, Ball Screw Drive, Motorless Type LEFS Series

                      Electric Actuator Guide Rod Slider Belt Drive LEL Series Step Motor

                        Electric slide table high rigidity type LESH series

                          Electric cylinder LZB series

                            Electric cylinder LZC series

                              Electric actuator rod type with guide motorless specification LEYG series

                                Electric Actuator Rod With Guide Type LEYG Series Step Motor/Servo Motor

                                • Promotional pricing

                                Electric Slide Table, Compact Type LES Series

                                  Electric actuator high rigidity slider type ball screw drive motorless specification LEJS series

                                    Electric actuator support guide ball screw drive LEFG series

                                      Electric actuator slider type belt drive motorless specification LEFB series

                                        Electric Actuator, Rod Type, Dust-Tight / Drip-Proof (Equivalent to IP65) Specifications, LEY-X5 Series, LECS□

                                          Electric Actuator Slider Type Belt Drive LEFB Series Step Motor/Servo Motor

                                            Electric actuator miniature rod type LEPY series step motor (Servo 24 V DC)

                                              Electric actuator rod type LEY series AC servo motor LECS□

                                                Electric actuator rod type dust-proof and drip-proof specification LEY series AC servo motor LECS□

                                                  Electric actuator support guide 11-LEFG series

                                                    Electric Actuator, Low Profile Slider Type, Basic Type, LEMB Series, Step Motor

                                                      Electric actuator guided rod type LEYG series AC servo motor LECS□

                                                        Programless controller LECP2 series with stroke learning function

                                                          Electric Actuator Miniature Slide Table Type LEPS Series Step Motor

                                                            AC Servo Motor Driver, Incremental Type, LECSA Series / Absolute Type

                                                              Card motor LAT3 series

                                                                3-axis step motor controller JXC92 series

                                                                  4-axis step motor controller JXC73 / 83/93 series

                                                                    Electric actuator support guide belt drive LEFG series

                                                                      Electric Actuator, High Stiffness Slider Type, Ball Screw Drive LEJS Series, LECS□

                                                                        Electric Actuator Low Profile Slider Type, Cam Follower Guide Type, LEMC Series Step Motor

                                                                          Electric actuator rod type LEY series AC servo motor LECY□

                                                                            Electric Actuator, Slider Type, Ball Screw Drive, Clean Specifications, 11-LEFS Series

                                                                              AC servo motor driver absolute type LECYM / LECYU series

                                                                                Electric Actuator, Guide Rod Type, LEYG Series

                                                                                  Electric Actuator, High Rigidity Slider Type, Belt Drive, LEJB Series

                                                                                    Electric actuator slider type belt drive LEFB series AC servo motor LECY□

                                                                                      Electric Actuator, High Stiffness Slider Type, Ball Screw Drive LEJS Series, LECY□

                                                                                        Electric actuator high rigidity slider type belt drive LEJB series AC servo motor LECS□

                                                                                        Brand

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                                                                                        SMC

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                                                                                        SMC

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                                                                                        SMC

                                                                                        SMC

                                                                                        SMC

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                                                                                        Product Series

                                                                                        Electric Actuator Slider Type Ball Screw Drive LEFS Series Step Motor/Servo Motor

                                                                                        Controller (Step Data Input Type) LECP6 (Step Motor) / LECA6 (Servo Motor) Series

                                                                                        Step motor controller JXCE1, 91, P1, D1, L1 series

                                                                                        Electric Actuator Rod Type LEY Series Step Motor/Servo Motor

                                                                                        Electric actuator rod type motorless specification LEY series

                                                                                        Electric actuator slider type belt drive LEFB series AC servo motor LECS□

                                                                                        Programless controller LECP1 series

                                                                                        Step motor driver LECPA series

                                                                                        Electric actuator slider type ball screw drive LEFS series AC servo motor LECS□

                                                                                        Electric Actuator, Slider Type, Ball Screw Drive, Motorless Type LEFS Series

                                                                                        Electric Actuator Guide Rod Slider Belt Drive LEL Series Step Motor

                                                                                        Electric slide table high rigidity type LESH series

                                                                                        Electric cylinder LZB series

                                                                                        Electric cylinder LZC series

                                                                                        Electric actuator rod type with guide motorless specification LEYG series

                                                                                        Electric Actuator Rod With Guide Type LEYG Series Step Motor/Servo Motor

                                                                                        Electric Slide Table, Compact Type LES Series

                                                                                        Electric actuator high rigidity slider type ball screw drive motorless specification LEJS series

                                                                                        Electric actuator support guide ball screw drive LEFG series

                                                                                        Electric actuator slider type belt drive motorless specification LEFB series

                                                                                        Electric Actuator, Rod Type, Dust-Tight / Drip-Proof (Equivalent to IP65) Specifications, LEY-X5 Series, LECS□

                                                                                        Electric Actuator Slider Type Belt Drive LEFB Series Step Motor/Servo Motor

                                                                                        Electric actuator miniature rod type LEPY series step motor (Servo 24 V DC)

                                                                                        Electric actuator rod type LEY series AC servo motor LECS□

                                                                                        Electric actuator rod type dust-proof and drip-proof specification LEY series AC servo motor LECS□

                                                                                        Electric actuator support guide 11-LEFG series

                                                                                        Electric Actuator, Low Profile Slider Type, Basic Type, LEMB Series, Step Motor

                                                                                        Electric actuator guided rod type LEYG series AC servo motor LECS□

                                                                                        Programless controller LECP2 series with stroke learning function

                                                                                        Electric Actuator Miniature Slide Table Type LEPS Series Step Motor

                                                                                        AC Servo Motor Driver, Incremental Type, LECSA Series / Absolute Type

                                                                                        Card motor LAT3 series

                                                                                        3-axis step motor controller JXC92 series

                                                                                        4-axis step motor controller JXC73 / 83/93 series

                                                                                        Electric actuator support guide belt drive LEFG series

                                                                                        Electric Actuator, High Stiffness Slider Type, Ball Screw Drive LEJS Series, LECS□

                                                                                        Electric Actuator Low Profile Slider Type, Cam Follower Guide Type, LEMC Series Step Motor

                                                                                        Electric actuator rod type LEY series AC servo motor LECY□

                                                                                        Electric Actuator, Slider Type, Ball Screw Drive, Clean Specifications, 11-LEFS Series

                                                                                        AC servo motor driver absolute type LECYM / LECYU series

                                                                                        Electric Actuator, Guide Rod Type, LEYG Series

                                                                                        Electric Actuator, High Rigidity Slider Type, Belt Drive, LEJB Series

                                                                                        Electric actuator slider type belt drive LEFB series AC servo motor LECY□

                                                                                        Electric Actuator, High Stiffness Slider Type, Ball Screw Drive LEJS Series, LECY□

                                                                                        Electric actuator high rigidity slider type belt drive LEJB series AC servo motor LECS□

                                                                                        CAD
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                                                                                        Starting from

                                                                                        988.33 €

                                                                                        *Unit price with basic configuration

                                                                                        7.27 €

                                                                                        *Unit price with basic configuration

                                                                                        5.19 €

                                                                                        *Unit price with basic configuration

                                                                                        595.53 €

                                                                                        *Unit price with basic configuration

                                                                                        475.09 €

                                                                                        *Unit price with basic configuration

                                                                                        1,209.41 €

                                                                                        *Unit price with basic configuration

                                                                                        16.49 €

                                                                                        *Unit price with basic configuration

                                                                                        5.73 €

                                                                                        *Unit price with basic configuration

                                                                                        1,432.34 €

                                                                                        *Unit price with basic configuration

                                                                                        127.39 €

                                                                                        Special price

                                                                                        *Unit price with basic configuration

                                                                                        Promotional pricing

                                                                                        520.43 €

                                                                                        *Unit price with basic configuration

                                                                                        695.53 €

                                                                                        *Unit price with basic configuration

                                                                                        278.34 €

                                                                                        *Unit price with basic configuration

                                                                                        380.90 €

                                                                                        *Unit price with basic configuration

                                                                                        97.34 €

                                                                                        *Unit price with basic configuration

                                                                                        24.21 €

                                                                                        *Unit price with basic configuration

                                                                                        627.53 €

                                                                                        Special price

                                                                                        *Unit price with basic configuration

                                                                                        Promotional pricing

                                                                                        37.09 €

                                                                                        *Unit price with basic configuration

                                                                                        315.13 €

                                                                                        *Unit price with basic configuration

                                                                                        138.39 €

                                                                                        *Unit price with basic configuration

                                                                                        1,128.06 €

                                                                                        *Unit price with basic configuration

                                                                                        924.41 €

                                                                                        *Unit price with basic configuration

                                                                                        493.87 €

                                                                                        *Unit price with basic configuration

                                                                                        1,000.57 €

                                                                                        *Unit price with basic configuration

                                                                                        1,878.61 €

                                                                                        *Unit price with basic configuration

                                                                                        371.60 €

                                                                                        *Unit price with basic configuration

                                                                                        679.23 €

                                                                                        *Unit price with basic configuration

                                                                                        1,213.06 €

                                                                                        *Unit price with basic configuration

                                                                                        343.51 €

                                                                                        *Unit price with basic configuration

                                                                                        598.76 €

                                                                                        *Unit price with basic configuration

                                                                                        83.24 €

                                                                                        *Unit price with basic configuration

                                                                                        13.87 €

                                                                                        *Unit price with basic configuration

                                                                                        1,682.18 €

                                                                                        *Unit price with basic configuration

                                                                                        12.15 €

                                                                                        *Unit price with basic configuration

                                                                                        383.87 €

                                                                                        *Unit price with basic configuration

                                                                                        2,562.24 €

                                                                                        *Unit price with basic configuration

                                                                                        1,094.31 €

                                                                                        *Unit price with basic configuration

                                                                                        1,173.60 €

                                                                                        *Unit price with basic configuration

                                                                                        918.92 €

                                                                                        *Unit price with basic configuration

                                                                                        17.32 €

                                                                                        *Unit price with basic configuration

                                                                                        1,224.97 €

                                                                                        *Unit price with basic configuration

                                                                                        3,091.37 €

                                                                                        *Unit price with basic configuration

                                                                                        1,995.80 €

                                                                                        *Unit price with basic configuration

                                                                                        2,740.10 €

                                                                                        *Unit price with basic configuration

                                                                                        2,232.19 €

                                                                                        *Unit price with basic configuration

                                                                                        Min. Shipping Days : 4 Days 4 Days 4 Days 7 Days 9 Days 26 Days 9 Days 12 Days 26 Days Same day 26 Days 8 Days 4 Days 26 Days 7 Days 7 Days Same day 26 Days 7 Days 26 Days 26 Days 4 Days 15 Days 26 Days 26 Days 26 Days 26 Days 26 Days 26 Days 15 Days 4 Days 17 Days 26 Days 26 Days 26 Days 26 Days 26 Days 26 Days 26 Days 26 Days 4 Days 4 Days 26 Days 26 Days 26 Days
                                                                                        Main Body, Peripheral ComponentsMain BodyPeripheral ComponentsPeripheral ComponentsMain BodyMain BodyMain BodyPeripheral ComponentsPeripheral ComponentsMain BodyMain Body / Peripheral ComponentsMain BodyMain BodyMain BodyMain BodyMain Body / Peripheral ComponentsMain Body / Peripheral ComponentsMain BodyMain Body / Peripheral ComponentsPeripheral ComponentsMain Body / Peripheral ComponentsMain BodyMain BodyMain BodyMain BodyMain BodyPeripheral ComponentsMain BodyMain BodyPeripheral ComponentsMain BodyPeripheral ComponentsMain Body / Peripheral ComponentsPeripheral ComponentsPeripheral ComponentsPeripheral ComponentsMain BodyMain BodyMain BodyMain BodyPeripheral Components--Main BodyMain BodyMain Body
                                                                                        TypeSliders--RodsRodsSliders--SlidersSlidersSlidersSlidersRodsRodsRodsRodsSlidersSliders-SlidersRodsSlidersRodsRodsRods-SlidersRods-Sliders-Sliders---SlidersSlidersRodsSliders---SlidersSlidersSliders
                                                                                        Stroke(mm)1,000 ~ 950--30 ~ 50030 ~ 8001,000 ~ 3000--1,000 ~ 9501,000 ~ 9501,000 ~ 90050 ~ 15010 ~ 20025 ~ 20030 ~ 30030 ~ 30030 ~ 1501,000 ~ 900-1,000 ~ 300030 ~ 5001,000 ~ 90025 ~ 7530 ~ 50050 ~ 800-1,000 ~ 170030 ~ 300-25 ~ 50-10 ~ 50---1,000 ~ 9001,000 ~ 170030 ~ 8001,000 ~ 850-50 ~ 200500 ~ 10001,000 ~ 30001,000 ~ 9001,000 ~ 3000
                                                                                        Max. Transportable Mass Range (Horizontal)(kg)2.1 to 5.0 / 5.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.0 / 50.1 to 100.0--2.1 to 5.0 / 5.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.0 / 50.1 to 100.010.1 to 20.0 / 20.1 to 50.0 / 50.1 to 100.0 / 150.1 or Higher2.1 to 5.0 / 10.1 to 20.0 / 20.1 to 50.0--5.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.0 / 50.1 to 100.05.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.0 / 50.1 to 100.02.1 to 5.00 to 2.0 / 2.1 to 5.0 / 5.1 to 10.0 / 10.1 to 20.02.1 to 5.0 / 5.1 to 10.0 / 10.1 to 20.02.1 to 5.0 / 5.1 to 10.0 / 10.1 to 20.010.1 to 20.0 / 20.1 to 50.0 / 50.1 to 100.02.1 to 5.0 / 5.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.0 / 50.1 to 100.00 to 2.0 / 2.1 to 5.010.1 to 20.0 / 20.1 to 50.0 / 50.1 to 100.0-2.1 to 5.0 / 10.1 to 20.0 / 20.1 to 50.010.1 to 20.0 / 20.1 to 50.0 / 50.1 to 100.00 to 2.0 / 2.1 to 5.0 / 5.1 to 10.0 / 10.1 to 20.00 to 2.0 / 2.1 to 5.0 / 5.1 to 10.010.1 to 20.0 / 20.1 to 50.0 / 50.1 to 100.020.1 to 50.0 / 50.1 to 100.0 / 150.1 or Higher-5.1 to 10.0 / 10.1 to 20.010.1 to 20.0 / 20.1 to 50.0 / 50.1 to 100.0-0 to 2.0-0 to 2.0---10.1 to 20.0 / 20.1 to 50.0 / 50.1 to 100.05.1 to 10.0 / 10.1 to 20.010.1 to 20.0 / 20.1 to 50.0 / 50.1 to 100.0 / 150.1 or Higher5.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.0 / 50.1 to 100.0---2.1 to 5.0 / 10.1 to 20.0 / 20.1 to 50.010.1 to 20.0 / 20.1 to 50.0 / 50.1 to 100.05.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.0
                                                                                        Max. Transportable Mass (Horizontal)(kg)5 ~ 65--3 ~ 9018 ~ 2005 ~ 25--10 ~ 6010 ~ 603 ~ 51 ~ 122.4 ~ 202.4 ~ 2018 ~ 603 ~ 901 ~ 515 ~ 85-5 ~ 2518 ~ 601 ~ 191 ~ 618 ~ 6040 ~ 200-6 ~ 1118 ~ 60-0.75 ~ 2-1---15 ~ 8510 ~ 2018 ~ 2009 ~ 65---5 ~ 2515 ~ 8510 ~ 30
                                                                                        Max. Transportable Mass Range (Vertical)(kg)0 to 2.0 / 2.1 to 5.0 / 5.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.0--0 to 2.0 / 2.1 to 5.0 / 5.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.0 / 50.1 to 100.05.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.0 / 50.1 to 100.0 / 100.1 or Higher---2.1 to 5.0 / 5.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.02.1 to 5.0 / 5.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.0-0 to 2.0 / 2.1 to 5.0--5.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.00 to 2.0 / 2.1 to 5.0 / 5.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.0 / 50.1 to 100.00 to 2.0 / 2.1 to 5.02.1 to 5.0 / 5.1 to 10.0 / 10.1 to 20.0--5.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.0-0 to 2.05.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.010.1 to 20.0 / 20.1 to 50.0 / 50.1 to 100.0 / 100.1 or Higher--5.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.0-0 to 2.0-0 to 2.0---2.1 to 5.0 / 5.1 to 10.0 / 10.1 to 20.0-5.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.0 / 50.1 to 100.0 / 100.1 or Higher0 to 2.0 / 2.1 to 5.0 / 5.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.0----2.1 to 5.0 / 5.1 to 10.0 / 10.1 to 20.0-
                                                                                        Max. Transportable Mass (Vertical)(kg)0.5 ~ 23--2 ~ 538 ~ 115---4 ~ 304 ~ 30-0.25 ~ 4--7 ~ 441.5 ~ 510.25 ~ 53 ~ 20--8 ~ 46-0.25 ~ 1.58 ~ 4619 ~ 115--7 ~ 44-0.25 ~ 1.5-0.05 ~ Not vertical---3 ~ 20-8 ~ 1152 ~ 23----3 ~ 20-
                                                                                        Drive MethodRolled Ball Screw--Rolled Ball ScrewRolled Ball ScrewBelts--Rolled Ball ScrewRolled Ball ScrewBeltsSlide ScrewsSlide ScrewsRolled Ball ScrewRolled Ball ScrewRolled Ball ScrewSlide ScrewsRolled Ball Screw-BeltsRolled Ball ScrewBeltsSlide ScrewsRolled Ball ScrewRolled Ball Screw-BeltsRolled Ball Screw-Rolled Ball Screw-Linear Motor---Rolled Ball ScrewBeltsRolled Ball ScrewRolled Ball Screw---BeltsRolled Ball ScrewBelts
                                                                                        GuideProvided--Not ProvidedProvidedProvided--ProvidedProvidedProvidedProvidedNot ProvidedNot ProvidedProvidedProvidedProvidedProvided-ProvidedNot ProvidedProvidedProvidedNot ProvidedNot Provided-ProvidedProvided-Provided-Provided---ProvidedProvidedNot ProvidedProvided---ProvidedProvidedProvided
                                                                                        Lead(mm)5 ~ 30--2.5 ~ 162.86 ~ 2054 equivalent--6 ~ 306 ~ 30Equivalent to 484 ~ 162 ~ 122 ~ 123 ~ 202.5 ~ 164 ~ 168 ~ 30-54 equivalent3 ~ 2048 ~ Equivalent to 484 ~ 103 ~ 202.86 ~ 20-Equivalent to 483 ~ 20-4 ~ 10-----8 ~ 30Equivalent to 482.86 ~ 205 ~ 20-5 ~ 1627 ~ 4254 equivalent8 ~ 3027 ~ 42
                                                                                        Input Power Supply24 V DC24 V DC-24 V DC------24 V DC24 V DC24 V DC24 V DC-24 V DC24 V DC----24 V DC24 V DC---24 V DC--24 V DCSingle-Phase, 100 to 120 V AC ~ Single-Phase, 200 to 230 V AC24 V DC----24 V DC-24 V DCThree-Phase, 200 to 230 V AC-----
                                                                                        Position DetectionIncrementalIncremental-Incremental-Incremental / Absolute--Incremental / AbsoluteIncrementalIncrementalIncremental---IncrementalIncremental---Incremental / AbsoluteIncrementalIncrementalIncremental / AbsoluteIncremental / Absolute-IncrementalIncremental / Absolute-IncrementalIncremental / AbsoluteIncremental---Incremental / AbsoluteIncrementalAbsoluteIncremental---AbsoluteAbsoluteIncremental / Absolute
                                                                                        I/O ModuleNPN / PNP / DeviceNet / Ethernet / Not Provided / EtherCAT / IO-Link / PROFINETNPN / PNPDeviceNet / Ethernet / EtherCAT / IO-Link / PROFINETNPN / PNP / DeviceNet / Ethernet / Not Provided / EtherCAT / IO-Link / PROFINET--NPN / PNPNPN / PNP--NPN / PNP / Ethernet / Not Provided / EtherCAT / PROFINETNPN / PNP / DeviceNet / Ethernet / Not Provided / EtherCAT / IO-Link / PROFINETNPN / PNP / Not ProvidedNPN / PNP / Not Provided-NPN / PNP / DeviceNet / Ethernet / Not Provided / EtherCAT / PROFINETNPN / PNP / DeviceNet / Ethernet / Not Provided / EtherCAT / IO-Link / PROFINET----NPN / PNP / DeviceNet / Ethernet / Not Provided / EtherCAT / IO-Link / PROFINETNPN / PNP / Ethernet / Not Provided / EtherCAT / PROFINET---NPN / PNP / Ethernet / Not Provided / EtherCAT / PROFINET-NPN / PNPNPN / PNP / Ethernet / Not Provided / EtherCAT / PROFINET-NPN / PNP / Not ProvidedEthernet---NPN / PNP / Ethernet / Not Provided / PROFINET-NPN / PNP / Ethernet / Not Provided / EtherCAT / PROFINET------
                                                                                        Table Width W1(mm)39.4 ~ 74----50 ~ 74--50 ~ 7450 ~ 745632 ~ 61----32.2 ~ 60105 ~ 129-50 ~ 74-39.4 ~ 60----61--19 ~ 24-49---105 ~ 12972.4 ~ 108.7-39.4 ~ 74---50 ~ 74105 ~ 129105 ~ 129
                                                                                        BrakeNot Provided / Provided--Not Provided / ProvidedNot ProvidedNot Provided / Provided--Not Provided / ProvidedNot ProvidedNot Provided / ProvidedNot Provided / ProvidedNot ProvidedNot ProvidedNot ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided-Not ProvidedNot Provided / ProvidedNot Provided / ProvidedNot ProvidedNot Provided / ProvidedNot Provided / Provided-Not Provided / ProvidedNot Provided / Provided-Not Provided-Not Provided---Not Provided / ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / Provided---Not Provided / ProvidedNot Provided / ProvidedNot Provided / Provided
                                                                                        Max. Thrust Force Range(N)0 to 100 / 101 to 200 / 201 to 300 / 301 to 500 / 501 to 1000--0 to 100 / 101 to 200 / 201 to 300 / 301 to 500 / 501 to 1000 / 1,001 or More101 to 200 / 201 to 300 / 301 to 500 / 501 to 1000 / 1,001 or More0 to 100 / 101 to 200 / 201 to 300--0 to 100 / 101 to 200 / 201 to 300 / 301 to 500 / 501 to 10000 to 100 / 101 to 200 / 201 to 300 / 301 to 500 / 501 to 10000 to 1000 to 100 / 101 to 2000 to 100 / 101 to 2000 to 100 / 101 to 200101 to 200 / 201 to 300 / 301 to 500 / 501 to 10000 to 100 / 101 to 200 / 201 to 300 / 301 to 500 / 501 to 1000 / 1,001 or More0 to 100 / 101 to 200101 to 200 / 201 to 300 / 301 to 500 / 501 to 1000-0 to 100 / 101 to 200 / 201 to 300101 to 200 / 201 to 300 / 301 to 500 / 501 to 1000-0 to 100101 to 200 / 201 to 300 / 301 to 500 / 501 to 1000501 to 1000 / 1,001 or More-0 to 100 / 101 to 200101 to 200 / 201 to 300 / 301 to 500 / 501 to 1000-0 to 100-0 to 100---101 to 200 / 201 to 300 / 301 to 500 / 501 to 10000 to 100 / 101 to 200101 to 200 / 201 to 300 / 301 to 500 / 501 to 1000 / 1,001 or More0 to 100 / 101 to 200 / 201 to 300 / 301 to 500 / 501 to 1000---0 to 100 / 101 to 200 / 201 to 300101 to 200 / 201 to 300 / 301 to 500 / 501 to 10000 to 100 / 101 to 200 / 201 to 300
                                                                                        Max. Thrust Force(N)49 ~ 637--30 ~ 1058131 ~ 334349 ~ 245--98 ~ 58898 ~ 58829.4 ~ 497.5 ~ 18024 ~ 19624 ~ 196131 ~ 73630 ~ 10587.5 ~ 180147 ~ 833-49 ~ 245131 ~ 736-10 ~ 50131 ~ 736521 ~ 3343-58.8 ~ 107.8131 ~ 736-10 ~ 50-2.5 ~ 6---147 ~ 83398 ~ 196131 ~ 334388.2 ~ 637---49 ~ 245147 ~ 83398 ~ 294
                                                                                        Noise FiltersNot Provided / Provided--Not ProvidedNot ProvidedNot Provided--Not ProvidedNot ProvidedNot ProvidedNot ProvidedNot ProvidedNot ProvidedNot ProvidedNot ProvidedNot ProvidedNot Provided-Not ProvidedNot ProvidedNot ProvidedNot ProvidedNot ProvidedNot Provided-Not ProvidedNot Provided-Not Provided-Not Provided---Not ProvidedNot ProvidedNot ProvidedNot Provided---Not ProvidedNot ProvidedNot Provided
                                                                                        Table Length L1(mm)72 ~ 170----102 ~ 170--102 ~ 170102 ~ 17064 ~ 82111 ~ 285----88.5 ~ 316.5160 ~ 172-102 ~ 170-72 ~ 122----78--76.4 ~ 113.2-60 ~ 150---160 ~ 17270 ~ 100-72 ~ 170---102 ~ 170160 ~ 172160 ~ 172
                                                                                        Usage EnvironmentStandard--StandardDust ResistantStandard--StandardStandardStandardStandard / Dust ResistantStandardStandardStandardStandardStandard / Dust ResistantStandard-StandardDust ResistantStandardStandardStandardDust Resistant-StandardStandard-Standard-Standard---StandardStandardDust ResistantStandard---StandardStandardStandard
                                                                                        Positioning Repeatability(µm)±15 ~ ±20--±20±10 ~ ±20±60--±10 ~ ±20±10 ~ ±20±80±50--±10 ~ ±20±20±50±10 ~ ±20-±60±20±80±50±10 ~ ±20±10 ~ ±20-±80±10 ~ ±20-±50-±5 ~ ±90---±10 ~ ±20±80±10 ~ ±20±15 ~ ±20---±60±10 ~ ±20±40
                                                                                        Maximum Velocity(mm/sec)1,000 ~ 1100--75 ~ 5001,000 ~ 10002000--1,000 ~ 15001,000 ~ 9401,000 ~ 500150 ~ 40033 ~ 20033 ~ 2001,000 ~ 90075 ~ 500200 ~ 4001,200 ~ 1800-20001,000 ~ 9001,500 ~ 2000150 ~ 3501,000 ~ 10001,000 ~ 800-1,0001,000 ~ 900-150 ~ 350-400---1,200 ~ 18001,0001,000 ~ 900250 ~ 500---20001,200 ~ 18002000 ~ 3000

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