Vacuum Valves（Type：Manual vacuum valve）

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• 

  High Vacuum Manual Valve MVB*17 Series

  CKD

  Stable sealing function using spring. Light and compact thanks to adoption of aluminum alloy body.

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  Starting from∗ ：	450.83 €
  Min. Shipping Days ：	8 Days

  *Unit price with basic configuration

• 

  XM and XY / High Vacuum Valves / Stainless Steel / Angle and In-line Types / 2-port Valve

  SMC

  A vacuum valve with a pressure-balanced structure that enables an unrestricted exhaust direction.
  [Features]
  · Bellows type is particulate-free and cleaned.
  · Low actuation torque (0.5 N·m or less).
  · Spring provides a standard sealing load.
  · Handle height remains the same regardless of whether valve is open or closed.
  · Equipped as standard with an indicator for confirming if the valve is open or closed.
  · Body material: SCS13 (SUS304 equivalent).
  · Precision-cast single-piece structure which helps prevent gas accumulation.
  · The XM Series is interchangeable with XL Series aluminum high vacuum angle valves.

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  Starting from∗ ：	545.09 €
  Min. Shipping Days ：	4 Days

  *Unit price with basic configuration

• 

  XLH, High Vacuum Manual Angle Valve, Bellows Seal

  SMC

  A high vacuum angle valve with a pressure-balanced structure that enables an unrestricted exhaust direction.
  [Features]
  · Bellows type is particulate-free and cleaned.
  · Low actuation torque (0.5 N·m or less).
  · Spring provides a standard sealing load.
  · Handle height remains the same regardless of whether valve is open or closed.
  · Equipped as standard with an indicator for confirming if the valve is open or closed.
  · Its low outgassing enables use with a smaller pump capacity and helps reduce exhaust time.
  · Does not contain heavy metals such as Ni (nickel) or Cr (chrome).
  · Low sputtering yield minimizes heavy metal contamination of wafers.

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  Starting from∗ ：	440.59 €
  Min. Shipping Days ：	4 Days

  *Unit price with basic configuration

• 

  XVD2, High Vacuum Valve, Smooth Vent

  SMC

  A smooth vent valve with an adjustable flow rate for both the initial and main air supplies.
  [Features]
  · An integrated valve and needle valve structure that requires on 1/4 the piping space of previous models.
  · Uses a metal diaphragm for the seat section, greatly reducing the generation of particulate matter.
  · Valve type: Normally closed (pressurize to open, spring seal).
  Fluids: Nitrogen, air, inert gas.
  · Operating temperature: 5 to 60°C (baking temperature, 150°C or less).
  · Weight: 0.5 kg.

  2D / 3D CAD data available

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  Starting from∗ ：	2,169.57 €
  Min. Shipping Days ：	17 Days

  *Unit price with basic configuration

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