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?* Information on days to ship and prices
SMC
Starting from∗ : | 280.69 € |
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Special price | |
Min. Shipping Days : | Same day |
*Unit price with basic configuration
SMC
Starting from∗ : | 402.35 € |
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Special price | |
Min. Shipping Days : | Same day |
*Unit price with basic configuration
SMC
Starting from∗ : | 308.48 € |
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Special price | |
Min. Shipping Days : | Same day |
*Unit price with basic configuration
SMC
Starting from∗ : | 221.89 € |
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Special price | |
Min. Shipping Days : | Same day |
*Unit price with basic configuration
SMC
Starting from∗ : | 262.29 € |
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Min. Shipping Days : | 26 Days |
*Unit price with basic configuration
SMC
Starting from∗ : | 189.97 € |
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Special price | |
Min. Shipping Days : | Same day |
*Unit price with basic configuration
SMC
Starting from∗ : | 279.53 € |
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Min. Shipping Days : | 4 Days |
*Unit price with basic configuration
SMC
Starting from∗ : | 156.89 € |
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Special price | |
Min. Shipping Days : | Same day |
*Unit price with basic configuration
SMC
Starting from∗ : | 406.02 € |
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Min. Shipping Days : | 4 Days |
*Unit price with basic configuration
SMC
Starting from∗ : | 807.56 € |
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Min. Shipping Days : | 4 Days |
*Unit price with basic configuration
SMC
Starting from∗ : | 345.00 € |
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Special price | |
Min. Shipping Days : | Same day |
*Unit price with basic configuration
SMC
Starting from∗ : | 121.47 € |
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Special price | |
Min. Shipping Days : | Same day |
*Unit price with basic configuration
SMC
Starting from∗ : | 388.00 € |
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Min. Shipping Days : | 4 Days |
*Unit price with basic configuration
SMC
Starting from∗ : | 297.97 € |
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Special price | |
Min. Shipping Days : | Same day |
*Unit price with basic configuration
SMC
Starting from∗ : | 747.16 € |
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Min. Shipping Days : | 4 Days |
*Unit price with basic configuration
SMC
Starting from∗ : | 269.02 € |
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Min. Shipping Days : | 4 Days |
*Unit price with basic configuration
SMC
Starting from∗ : | 543.53 € |
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Min. Shipping Days : | 4 Days |
*Unit price with basic configuration
SMC
Starting from∗ : | 152.58 € |
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Min. Shipping Days : | 4 Days |
*Unit price with basic configuration
SMC
Starting from∗ : | 830.98 € |
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Min. Shipping Days : | 4 Days |
*Unit price with basic configuration
SMC
Starting from∗ : | 508.69 € |
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Min. Shipping Days : | 4 Days |
*Unit price with basic configuration
SMC
Starting from∗ : | 963.29 € |
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Min. Shipping Days : | 4 Days |
*Unit price with basic configuration
SMC
Starting from∗ : | 338.74 € |
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Min. Shipping Days : | 26 Days |
*Unit price with basic configuration
SMC
Starting from∗ : | 296.00 € |
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Min. Shipping Days : | 4 Days |
*Unit price with basic configuration
SMC
Starting from∗ : | 372.60 € |
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Min. Shipping Days : | 26 Days |
*Unit price with basic configuration
SMC
Starting from∗ : | 321.79 € |
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Min. Shipping Days : | 4 Days |
*Unit price with basic configuration
SMC
Starting from∗ : | 225.77 € |
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Special price | |
Min. Shipping Days : | Same day |
*Unit price with basic configuration
SMC
Starting from∗ : | 513.60 € |
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Special price | |
Min. Shipping Days : | Same day |
*Unit price with basic configuration
SMC
Starting from∗ : | 622.52 € |
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Special price | |
Min. Shipping Days : | Same day |
*Unit price with basic configuration
SMC
Starting from∗ : | 351.05 € |
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Min. Shipping Days : | 4 Days |
*Unit price with basic configuration
SMC
Starting from∗ : | 626.15 € |
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Min. Shipping Days : | 4 Days |
*Unit price with basic configuration
SMC
Starting from∗ : | 221.71 € |
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Min. Shipping Days : | 4 Days |
*Unit price with basic configuration
SMC
Starting from∗ : | 1,225.27 € |
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Min. Shipping Days : | 26 Days |
*Unit price with basic configuration
SMC
Starting from∗ : | 606.03 € |
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Min. Shipping Days : | 26 Days |
*Unit price with basic configuration
Min. Shipping Days : | Quote |
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Starting from∗ : | 1,110.84 € |
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Min. Shipping Days : | 26 Days |
*Unit price with basic configuration
SMC
Starting from∗ : | 433.89 € |
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Min. Shipping Days : | 4 Days |
*Unit price with basic configuration
SMC
Starting from∗ : | 321.73 € |
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Special price | |
Min. Shipping Days : | Same day |
*Unit price with basic configuration
SMC
Starting from∗ : | 679.81 € |
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Min. Shipping Days : | 4 Days |
*Unit price with basic configuration
SMC
Starting from∗ : | 648.74 € |
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Min. Shipping Days : | 26 Days |
*Unit price with basic configuration
SMC
Starting from∗ : | 4,392.31 € |
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Min. Shipping Days : | 4 Days |
*Unit price with basic configuration
SMC
Starting from∗ : | 814.23 € |
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Min. Shipping Days : | 26 Days |
*Unit price with basic configuration
SMC
Starting from∗ : | 1,358.63 € |
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Min. Shipping Days : | 26 Days |
*Unit price with basic configuration
SMC
Starting from∗ : | 1,125.69 € |
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Min. Shipping Days : | 26 Days |
*Unit price with basic configuration
SMC
Starting from∗ : | 905.19 € |
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Min. Shipping Days : | 4 Days |
*Unit price with basic configuration
SMC
Starting from∗ : | 626.21 € |
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Min. Shipping Days : | 26 Days |
*Unit price with basic configuration
Brand |
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Product Series |
CAD |
Starting from∗ |
Min. Shipping Days : |
Type |
Stroke(mm) |
Table Material |
Max. Load Mass (Range Selectable)(kg) |
Table Size Length L(mm) |
Cylinder Inner Diameter(Ø) |
Rodless Cylinder Joint Type |
Usage Environment |
Table Surface Treatment |
Guide |
Table Size Width W(mm) |
Table Size Height H(mm) |
Operating Pressure(MPa) |
Table Parallelism(µm) |
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Brand | SMC | SMC | SMC | SMC | SMC | SMC | SMC | SMC | SMC | SMC | SMC | SMC | SMC | SMC | SMC | SMC | SMC | SMC | SMC | SMC | SMC | SMC | SMC | SMC | SMC | SMC | SMC | SMC | SMC | SMC | SMC | SMC | SMC | SMC | SMC | SMC | SMC | SMC | SMC | SMC | SMC | SMC | SMC | SMC | SMC |
Product Series | Mechanically Jointed Rodless Cylinder, Basic Type, MY1B-Z Series | Magnet Type Rodless Cylinder, Basic Type Clean Series 12-CY3B Series | Mechanically Jointed Rodless Cylinder, Basic Type, MY3A / 3B Series | Mechanically Jointed Rodless Cylinder, Basic Type, MY1B Series | Magnetically Coupled Rodless Cylinder, Slide Bearing, CY1S-Z Series | CY3R, Magnetically Coupled Rodless Cylinder (with Switch Rail) | MY1M, Mechanical Joint Rodless Cylinder, Slide Bearing Type w / o Stroke Adjustment | MY1C, Mechanical Joint Rodless Cylinder, Cam Follower Guide w / o Stroke Adjustment | Mechanically Jointed Rodless Cylinder, Linear Guide Type MY1H Series | Mechanically Jointed Rodless Cylinder, Linear Guide Type, MY1H-Z Series | Sine Rodless Cylinder, Slider Type: Slide Bearing, REAS Series | Air Slide Table, Clean, Low Dust Generation 13 / 20 / 22-MXS Series | Mechanically Jointed Rodless Cylinder With Protective Cover, MY1□W Series | Mechanically Jointed Rodless Cylinder, Linear Guide Type, MY2H / HT Series | MY2C, Mechanical Joint Rodless Cylinder, Cam Follower Guide, w / o Stroke Adjustment Unit | CY1F, Magnetically Coupled Rodless Cylinder, Low Profile Guide | Air Slide Table, Clean and Low Dust Generation 13 / 20 / 22-MXQ Series | Mechanical Joint Type Rodless Cylinder, Basic Type 55-MY1B Series | Mechanical joint type rodless cylinder linear guide type 55-MY1H series | CY1H, Magnetically Coupled Rodless Cylinder, High Precision Guide | Mechanically Jointed Rodless Cylinder, High-Rigidity Linear Guide Type MY1HT Series | Mechanically Jointed Hy-Rodless Cylinder With Brake, ML1C Series | Sine Rodless Cylinder, Slider Type: Ball Bushing Bearing, REAL Series | ||||||||||||||||||||||
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Starting from∗ | 280.69 € Special price *Unit price with basic configuration Promotional pricing | 402.35 € Special price *Unit price with basic configuration Promotional pricing | 308.48 € Special price *Unit price with basic configuration Promotional pricingVolume Discount | 221.89 € Special price *Unit price with basic configuration Promotional pricing | 262.29 € *Unit price with basic configuration | 189.97 € Special price *Unit price with basic configuration Promotional pricing | 279.53 € *Unit price with basic configuration | 156.89 € Special price *Unit price with basic configuration Promotional pricing | 406.02 € *Unit price with basic configuration | 807.56 € *Unit price with basic configuration | 345.00 € Special price *Unit price with basic configuration Promotional pricing | 121.47 € Special price *Unit price with basic configuration Promotional pricing | 388.00 € *Unit price with basic configuration | 297.97 € Special price *Unit price with basic configuration Promotional pricing | 747.16 € *Unit price with basic configuration | 269.02 € *Unit price with basic configuration | 543.53 € *Unit price with basic configuration | 152.58 € *Unit price with basic configuration | 830.98 € *Unit price with basic configuration | 508.69 € *Unit price with basic configuration | 963.29 € *Unit price with basic configuration | 338.74 € *Unit price with basic configuration | 296.00 € *Unit price with basic configuration | 372.60 € *Unit price with basic configuration | 321.79 € *Unit price with basic configuration | 225.77 € Special price *Unit price with basic configuration Promotional pricing | 513.60 € Special price *Unit price with basic configuration Promotional pricing | 622.52 € Special price *Unit price with basic configuration Promotional pricing | 351.05 € *Unit price with basic configuration | 626.15 € *Unit price with basic configuration | 221.71 € *Unit price with basic configuration | 1,225.27 € *Unit price with basic configuration | 606.03 € *Unit price with basic configuration | - | 1,110.84 € *Unit price with basic configuration | 433.89 € *Unit price with basic configuration | 321.73 € Special price *Unit price with basic configuration Promotional pricing | 679.81 € *Unit price with basic configuration | 648.74 € *Unit price with basic configuration | 4,392.31 € *Unit price with basic configuration | 814.23 € *Unit price with basic configuration | 1,358.63 € *Unit price with basic configuration | 1,125.69 € *Unit price with basic configuration | 905.19 € *Unit price with basic configuration | 626.21 € *Unit price with basic configuration |
Min. Shipping Days : | Same day | Same day | Same day | Same day | 26 Days | Same day | 4 Days | Same day | 4 Days | 4 Days | Same day | Same day | 4 Days | Same day | 4 Days | 4 Days | 4 Days | 4 Days | 4 Days | 4 Days | 4 Days | 26 Days | 4 Days | 26 Days | 4 Days | Same day | Same day | Same day | 4 Days | 4 Days | 4 Days | 26 Days | 26 Days | Quote | 26 Days | 4 Days | Same day | 4 Days | 26 Days | 4 Days | 26 Days | 26 Days | 26 Days | 4 Days | 26 Days |
Type | L-Style Table Type | L-Style Table Type | Rodless Cylinder | L-Style Table Type | Rodless Cylinder | Rodless Cylinder | L-Style Table Type | Rodless Cylinder | Rodless Cylinder | Table Type | Rodless Cylinder | Rodless Cylinder | Rodless Cylinder | L-Style Table Type | Rodless Cylinder | Table Type | Rodless Cylinder | Rodless Cylinder | Rodless Cylinder | Rodless Cylinder | Rodless Cylinder | L-Style Table Type | Rodless Cylinder | L-Style Table Type | L-Style Table Type | L-Style Table Type | Rodless Cylinder | Rodless Cylinder | Rodless Cylinder | Rodless Cylinder | Rodless Cylinder | Rodless Cylinder | L-Style Table Type | Rodless Cylinder | Rodless Cylinder | Table Type | L-Style Table Type | Rodless Cylinder | Rodless Cylinder | Rodless Cylinder | Rodless Cylinder | Rodless Cylinder | Rodless Cylinder | Rodless Cylinder | Rodless Cylinder |
Stroke(mm) | 10 ~ 200 | 10 ~ 150 | 1,000 ~ 3500 | 5 ~ 60 | 100 ~ 700 | 1,000 ~ 2200 | 10 ~ 150 | 1,000 ~ 4200 | 1,000 ~ 2400 | 25 ~ 300 | 1,000 ~ 1450 | 1,000 ~ 1920 | 1,000 ~ 2900 | 10 ~ 200 | 1,000 ~ 3500 | 5 ~ 30 | 1,000 ~ 900 | 1,000 ~ 3800 | 1,000 ~ 900 | 1,000 ~ 1150 | 1,000 ~ 3300 | 10 ~ 150 | 1,000 ~ 1600 | 10 ~ 150 | 10 ~ 100 | 10 ~ 40 | 1,000 ~ 1850 | 1,000 ~ 1320 | 1,000 ~ 1400 | 1,000 ~ 1650 | 50 ~ 800 | 100 ~ 700 | 10 ~ 150 | 1,000 ~ 3200 | 300 ~ 450 | 50 ~ 400 | 10 | 1,000 ~ 950 | 1,000 ~ 1600 | 100 ~ 700 | 1,000 ~ 800 | 1,000 ~ 1650 | 1,000 ~ 800 | 1,000 ~ 800 | 1,000 ~ 1250 |
Table Material | Aluminum | Aluminum | Aluminum | Aluminum | Aluminum | Aluminum | Aluminum | Aluminum | Aluminum | Aluminum | Aluminum | Aluminum | Aluminum | Aluminum | Aluminum | Aluminum | Aluminum | Aluminum | Aluminum | Aluminum | Aluminum | Aluminum | Aluminum | Aluminum | Aluminum | Aluminum | Aluminum | Aluminum | Aluminum | Aluminum | Aluminum | Aluminum | Aluminum | Aluminum | Aluminum | Aluminum | Aluminum | Aluminum | Aluminum | Aluminum | Aluminum | Aluminum | Aluminum | Aluminum | Aluminum |
Max. Load Mass (Range Selectable)(kg) | 0.05 to 0.8 ~ 5 to 9.2 | 0.05 to 0.8 ~ 5 to 9.2 | 20 to 39.9 ~ 40 to 57 | - | 1 to 4.9 | 5 to 9.2 ~ 60 to 80 | 0.05 to 0.8 ~ 5 to 9.2 | 5 to 9.2 ~ 120 to 150.1 | 10 to 19 ~ 153 or More | 1 to 4.9 ~ 10 to 19 | 1 to 4.9 ~ 40 to 57 | 0.05 to 0.8 ~ 1 to 4.9 | 10 to 19 ~ 153 or More | 0.05 to 0.8 ~ 5 to 9.2 | 10 to 19 ~ 120 to 150.1 | 0.05 to 0.8 ~ 1 to 4.9 | 5 to 9.2 ~ 10 to 19 | 0.05 to 0.8 ~ 1 to 4.9 | 20 to 39.9 ~ 40 to 57 | 1 to 4.9 ~ 40 to 57 | 1 to 4.9 | 0.05 to 0.8 ~ 5 to 9.2 | 0.05 to 0.8 ~ 1 to 4.9 | 0.05 to 0.8 ~ 5 to 9.2 | 0.05 to 0.8 ~ 1 to 4.9 | - | 10 to 19 ~ 153 or More | 10 to 19 ~ 60 to 80 | 1 to 4.9 ~ 40 to 57 | 10 to 19 ~ 60 to 80 | 1 to 4.9 ~ 10 to 19 | 1 to 4.9 ~ 5 to 9.2 | 0.05 to 0.8 ~ 5 to 9.2 | 5 to 9.2 ~ 120 to 150.1 | 20 to 39.9 ~ 40 to 57 | 0.05 to 0.8 ~ 1 to 4.9 | 0.05 to 0.8 | 1 to 4.9 ~ 40 to 57 | 1 to 4.9 | 1 to 4.9 ~ 5 to 9.2 | 60 to 80 ~ 153 or More | 20 to 39.9 ~ 40 to 57 | 5 to 9.2 ~ 40 to 57 | 1 to 4.9 ~ 40 to 57 | 1 to 4.9 ~ 40 to 57 |
Table Size Length L(mm) | 42 ~ 306 | 42 ~ 283 | 110 ~ 170 | 42 ~ 114 | 57 ~ 92 | 65 ~ 220 | 54.5 ~ 339 | 50 ~ 400 | 65 ~ 220 | 84 ~ 209 | 40 ~ 95 | 34 ~ 118 | 80 ~ 230 | 42 ~ 306 | 80 ~ 230 | 21 ~ 56 | 50 ~ 100 | 35 ~ 122 | 114 ~ 170 | 45 ~ 95 | 70 ~ 122 | 55 ~ 343 | 38 ~ 90 | 59.5 ~ 339 | 54 ~ 211 | 42 ~ 79 | 110 ~ 290 | 70 ~ 158 | 40 ~ 136 | 70 ~ 158 | 38 ~ 89 | 67 ~ 90 | 63 ~ 323.5 | 50 ~ 400 | 114 ~ 170 | 32 ~ 52 | 42 | 46 ~ 138 | 53 ~ 76 | 67 ~ 90 | 200 ~ 240 | 120 ~ 170 | 106 ~ 138 | 46 ~ 138 | 68 ~ 136 |
Cylinder Inner Diameter(Ø) | 6 ~ 25 | 6 ~ 25 | 25 ~ 40 | 6 ~ 20 | 15 ~ 40 | 16 ~ 63 | 6 ~ 25 | 10 ~ 100 | 16 ~ 63 | 8 ~ 25 | 6 ~ 40 | 6 ~ 63 | 16 ~ 63 | 6 ~ 25 | 16 ~ 63 | 6 ~ 16 | 10 ~ 20 | 6 ~ 63 | 25 ~ 40 | 10 ~ 40 | 25 ~ 63 | 6 ~ 25 | 10 ~ 40 | 6 ~ 25 | 8 ~ 20 | 6 ~ 20 | 16 ~ 63 | 16 ~ 40 | 6 ~ 40 | 16 ~ 40 | 10 ~ 25 | 15 ~ 32 | 6 ~ 25 | 10 ~ 100 | 25 ~ 40 | 6 ~ 12 | 6 | 10 ~ 32 | 15 ~ 32 | 15 ~ 32 | 50 ~ 63 | 25 ~ 40 | 15 ~ 25 | 10 ~ 32 | 10 ~ 40 |
Rodless Cylinder Joint Type | - | - | Mechanical Joint Type | - | Magnet Type | Mechanical Joint Type | - | Mechanical Joint Type | Mechanical Joint Type | - | Magnet Type | Magnet Type | Mechanical Joint Type | - | Mechanical Joint Type | - | Mechanical Joint Type | Magnet Type | Mechanical Joint Type | Magnet Type | Magnet Type | - | Magnet Type | Mechanical Joint Type | - | - | Mechanical Joint Type | Mechanical Joint Type | Magnet Type | Mechanical Joint Type | Magnet Type | Magnet Type | - | Mechanical Joint Type | Mechanical Joint Type | - | - | Magnet Type | Magnet Type | Magnet Type | Mechanical Joint Type | Mechanical Joint Type | Magnet Type | Magnet Type | Magnet Type |
Usage Environment | General Purpose | General Purpose | General Purpose / Copper-Based / Fluorine-Based Material Not Used | General Purpose | General Purpose | General Purpose | General Purpose | General Purpose / Copper-Based / Fluorine-Based Material Not Used | General Purpose | General Purpose | General Purpose | General Purpose | General Purpose | General Purpose | General Purpose | General Purpose | General Purpose | General Purpose / Heat Resistant | General Purpose | General Purpose | General Purpose | Dust Resistant / Copper-Based / Fluorine-Based Material Not Used / Cleanroom | General Purpose | General Purpose | General Purpose | General Purpose | General Purpose / Water Resistant / Dust Resistant | General Purpose | General Purpose | General Purpose | General Purpose | General Purpose | Dust Resistant / Copper-Based / Fluorine-Based Material Not Used / Cleanroom | General Purpose | General Purpose | General Purpose | General Purpose | General Purpose | General Purpose | Vacuum | General Purpose | General Purpose | General Purpose | General Purpose | General Purpose |
Table Surface Treatment | Clear Anodize | Nickel Plating | Clear Anodize | Clear Anodize | Clear Anodize | Nickel Plating | - | Clear Anodize | Clear Anodize | Clear Anodize | Not Provided | Clear Anodize | Clear Anodize | Clear Anodize | Nickel Plating | - | Clear Anodize | Clear Anodize | Clear Anodize | Clear Anodize | Not Provided | Clear Anodize | Clear Anodize | Not Provided | Clear Anodize | Clear Anodize | Clear Anodize | Clear Anodize | Clear Anodize | Clear Anodize | Clear Anodize | Nickel Plating | Nickel Plating | Clear Anodize | Clear Anodize | Nickel Plating | Clear Anodize | Clear Anodize | Clear Anodize | Nickel Plating | Clear Anodize | Clear Anodize | Clear Anodize | Clear Anodize | Clear Anodize |
Guide | Rolling Guide | Rolling Guide | Guideless | Rolling Guide | Guideless | Guideless | Rolling Guide | Guideless | Slide Guide | Rolling Guide | Slide Guide | Guideless | Slide Guide | Rolling Guide | Rolling Guide | Rolling Guide | Rolling Guide | Guideless | Rolling Guide | Slide Guide | Guideless | Rolling Guide | Guideless | Rolling Guide | Rolling Guide | Rolling Guide | Slide Guide / Rolling Guide | Rolling Guide | Rolling Guide | Rolling Guide | Guideless | Guideless | Rolling Guide | Guideless | Rolling Guide | Rolling Guide | Rolling Guide | Rolling Guide | Guideless | Rolling Guide | Rolling Guide | Rolling Guide | Rolling Guide | Rolling Guide | Rolling Guide |
Table Size Width W(mm) | 32 ~ 92 | 27 ~ 74 | 42 ~ 64 | 10 ~ 31 | 35 ~ 70 | 41 ~ 134 | 32 ~ 70 | 24 ~ 140 | 64 ~ 176 | 49 ~ 126 | 46 ~ 139 | 18.5 ~ 97 | 68 ~ 168 | 32 ~ 92 | 58 ~ 168 | 18 ~ 46 | 43 ~ 78 | 17 ~ 100 | 90 ~ 121 | 58 ~ 142 | 46 ~ 100 | 32 ~ 92 | 25.5 ~ 63.5 | 32 ~ 70 | 31 ~ 51.5 | 15 ~ 19 | 84 ~ 236 | 50.4 ~ 148.3 | 56 ~ 187 | 72.4 ~ 158 | 50.5 ~ 86 | 69 ~ 115 | 27 ~ 74 | 24 ~ 140 | 90 ~ 121 | 30 ~ 50 | 32 | 54 ~ 130 | 31.5 ~ 53.5 | 69 ~ 115 | 92 ~ 273 | 108 ~ 158 | 71.5 ~ 119 | 54 ~ 130 | 77 ~ 187 |
Table Size Height H(mm) | 20 ~ 62 | 20 ~ 55 | 54 ~ 84 | 39 ~ 64.5 | 35 ~ 70 | 27 ~ 84 | 23 ~ 52 | 27 ~ 190 | 33 ~ 93 | 30 ~ 76 | 27 ~ 76 | 19 ~ 97 | 40 ~ 130 | 20 ~ 62 | 40 ~ 130 | 17 ~ 32 | 27 ~ 46 | 17 ~ 100 | 54 ~ 84 | 34 ~ 76 | 46 ~ 100 | 20 ~ 62 | 26 ~ 67 | 23 ~ 52 | 16 ~ 27 | 39 ~ 47 | 52 ~ 149 | 28 ~ 58 | 25 ~ 78 | 28 ~ 58 | 28 ~ 46 | 45 ~ 75 | 20 ~ 55 | 27 ~ 190 | 54 ~ 84 | 21.5 ~ 36 | 20 | 39.5 ~ 75 | 32 ~ 55 | 45 ~ 75 | 94 ~ 170 | 87 ~ 118 | 46 ~ 75 | 39.5 ~ 75 | 34 ~ 78 |
Operating Pressure(MPa) | - | - | 0.1 to 0.8 | - | 0.12 to 0.7 ~ 0.16 to 0.7 | 0.15 to 0.8 ~ 0.2 to 0.8 | - | 0.1 to 0.8 ~ 0.2 to 0.8 | 0.15 to 0.7 ~ 0.2 to 0.7 | - | 0.18 to 0.7 | 0.12 to 0.7 ~ 0.16 to 0.7 | 0.15 to 0.8 ~ 0.2 to 0.8 | - | 0.1 to 0.8 ~ 0.15 to 0.8 | - | 0.15 to 0.8 ~ 0.2 to 0.8 | 0.12 to 0.7 ~ 0.16 to 0.7 | 0.1 to 0.8 | 0.18 to 0.7 | 0.18 to 0.7 | 0.15 to 0.7 | 0.18 to 0.7 | 0.15 to 0.6 ~ 0.3 to 0.7 | - | - | 0.1 to 0.8 ~ 0.2 to 0.8 | 0.1 to 0.8 ~ 0.15 to 0.8 | 0.18 to 0.7 | 0.1 to 0.8 ~ 0.15 to 0.8 | 0.2 to 0.7 | 0.05 to 0.3 | 0.15 to 0.7 | 0.1 to 0.8 ~ 0.2 to 0.8 | 0.1 to 0.8 | - | - | 0.2 to 0.7 | 0.18 to 0.7 | 0.05 to 0.3 | 0.1 to 0.8 | 0.1 to 0.8 | 0.2 to 0.7 | 0.2 to 0.7 | 0.18 to 0.7 |
Table Parallelism(µm) | - | 25 ~ 125 | - | 50 ~ 100 | - | - | - | - | - | - | - | - | 120 | - | - | 20 | - | - | - | - | - | - | - | - | - | 50 ~ 100 | - | - | - | 50 | 50 | - | 25 ~ 125 | - | - | - | - | - | - | - | 50 | - | - | - | - |
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