SMC Single Axis Robots(Usage Environment:Standard)

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Main Body, Peripheral Components
Type
Stroke(mm)
Max. Transportable Mass Range (Horizontal)(kg)
Max. Transportable Mass (Horizontal)(kg)
Max. Transportable Mass Range (Vertical)(kg)
Max. Transportable Mass (Vertical)(kg)
Drive Method
Guide
Lead(mm)
Input Power Supply
Position Detection
I/O Module
Table Width W1(mm)
Brake
Max. Thrust Force Range(N)
Max. Thrust Force(N)
Noise Filters
Table Length L1(mm)
Usage Environment
Positioning Repeatability(µm)
Maximum Velocity(mm/sec)

    Electric Actuator Slider Type Ball Screw Drive LEFS Series Step Motor/Servo Motor

      Electric Actuator Rod Type LEY Series Step Motor/Servo Motor

        Electric actuator rod type LEY series AC servo motor LECS□

          Electric slide table high rigidity type LESH series

          • Promotional pricing

          Electric Slide Table, Compact Type LES Series

            Electric actuator rod type with guide motorless specification LEYG series

              Electric actuator slider type belt drive motorless specification LEFB series

                Electric Actuator Slider Type Belt Drive LEFB Series Step Motor/Servo Motor

                • Promotional pricing

                Electric Actuator, Slider Type, Ball Screw Drive, Motorless Type LEFS Series

                  Electric actuator slider type ball screw drive LEFS series AC servo motor LECS□

                    Electric actuator high rigidity slider type belt drive LEJB series AC servo motor LECS□

                      Electric actuator miniature rod type LEPY series step motor (Servo 24 V DC)

                        Electric Actuator Rod With Guide Type LEYG Series Step Motor/Servo Motor

                          Electric Actuator, Slider Type, Ball Screw Drive, Clean Specifications, 11-LEFS Series, LECS□

                            Electric cylinder LZB series

                              Electric actuator high rigidity slider type ball screw drive motorless specification LEJS series

                                Electric Actuator, High Stiffness Slider Type, Ball Screw Drive LEJS Series, LECS□

                                  Electric Actuator Miniature Slide Table Type LEPS Series Step Motor

                                    Card motor LAT3 series

                                      Electric actuator slider type belt drive LEFB series AC servo motor LECY□

                                        Electric Actuator Guide Rod Slider Belt Drive LEL Series Step Motor

                                          Electric Actuator Low Profile Slider Type, Cam Follower Guide Type, LEMC Series Step Motor

                                            Electric Actuator, Low Profile Slider Type, Linear Guide 1-Axis/2-Axis, LEMH/LEMHT Series

                                              Electric cylinder LZC series

                                                Electric actuator slider type belt drive LEFB series AC servo motor LECS□

                                                  Electric Actuator, High Stiffness Slider Type, Ball Screw Drive LEJS Series, LECY□

                                                    Electric Actuator, Low Profile Slider Type, Basic Type, LEMB Series, Step Motor

                                                      Electric Actuator, Rod Type, Dust-Tight / Drip-Proof (Equivalent to IP65) Specifications, LEY-X5 Series

                                                        Electric actuator guided rod type LEYG series AC servo motor LECS□

                                                          Electric actuator rod type with guide LEYG series AC servo motor LECY□

                                                            Electric Actuator, Slider Type, Ball Screw Drive, Clean Specifications, 11-LEFS Series

                                                              Electric Actuator, High Stiffness Slider Type, Ball Screw Drive, 11-LEJS Series, LECS□

                                                                Electric actuator slider type ball screw drive LEFS series AC servo motor LECY□

                                                                  Electric actuator high rigidity slider type belt drive LEJB series AC servo motor LECY□

                                                                  Brand

                                                                  SMC

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                                                                  SMC

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                                                                  SMC

                                                                  SMC

                                                                  SMC

                                                                  SMC

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                                                                  SMC

                                                                  SMC

                                                                  SMC

                                                                  SMC

                                                                  SMC

                                                                  SMC

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                                                                  SMC

                                                                  SMC

                                                                  SMC

                                                                  SMC

                                                                  SMC

                                                                  SMC

                                                                  SMC

                                                                  SMC

                                                                  SMC

                                                                  SMC

                                                                  SMC

                                                                  SMC

                                                                  SMC

                                                                  SMC

                                                                  SMC

                                                                  SMC

                                                                  Product Series

                                                                  Electric Actuator Slider Type Ball Screw Drive LEFS Series Step Motor/Servo Motor

                                                                  Electric Actuator Rod Type LEY Series Step Motor/Servo Motor

                                                                  Electric actuator rod type LEY series AC servo motor LECS□

                                                                  Electric slide table high rigidity type LESH series

                                                                  Electric Slide Table, Compact Type LES Series

                                                                  Electric actuator rod type with guide motorless specification LEYG series

                                                                  Electric actuator slider type belt drive motorless specification LEFB series

                                                                  Electric Actuator Slider Type Belt Drive LEFB Series Step Motor/Servo Motor

                                                                  Electric Actuator, Slider Type, Ball Screw Drive, Motorless Type LEFS Series

                                                                  Electric actuator slider type ball screw drive LEFS series AC servo motor LECS□

                                                                  Electric actuator high rigidity slider type belt drive LEJB series AC servo motor LECS□

                                                                  Electric actuator miniature rod type LEPY series step motor (Servo 24 V DC)

                                                                  Electric Actuator Rod With Guide Type LEYG Series Step Motor/Servo Motor

                                                                  Electric Actuator, Slider Type, Ball Screw Drive, Clean Specifications, 11-LEFS Series, LECS□

                                                                  Electric cylinder LZB series

                                                                  Electric actuator high rigidity slider type ball screw drive motorless specification LEJS series

                                                                  Electric Actuator, High Stiffness Slider Type, Ball Screw Drive LEJS Series, LECS□

                                                                  Electric Actuator Miniature Slide Table Type LEPS Series Step Motor

                                                                  Card motor LAT3 series

                                                                  Electric actuator slider type belt drive LEFB series AC servo motor LECY□

                                                                  Electric Actuator Guide Rod Slider Belt Drive LEL Series Step Motor

                                                                  Electric Actuator Low Profile Slider Type, Cam Follower Guide Type, LEMC Series Step Motor

                                                                  Electric Actuator, Low Profile Slider Type, Linear Guide 1-Axis/2-Axis, LEMH/LEMHT Series

                                                                  Electric cylinder LZC series

                                                                  Electric actuator slider type belt drive LEFB series AC servo motor LECS□

                                                                  Electric Actuator, High Stiffness Slider Type, Ball Screw Drive LEJS Series, LECY□

                                                                  Electric Actuator, Low Profile Slider Type, Basic Type, LEMB Series, Step Motor

                                                                  Electric Actuator, Rod Type, Dust-Tight / Drip-Proof (Equivalent to IP65) Specifications, LEY-X5 Series

                                                                  Electric actuator guided rod type LEYG series AC servo motor LECS□

                                                                  Electric actuator rod type with guide LEYG series AC servo motor LECY□

                                                                  Electric Actuator, Slider Type, Ball Screw Drive, Clean Specifications, 11-LEFS Series

                                                                  Electric Actuator, High Stiffness Slider Type, Ball Screw Drive, 11-LEJS Series, LECS□

                                                                  Electric actuator slider type ball screw drive LEFS series AC servo motor LECY□

                                                                  Electric actuator high rigidity slider type belt drive LEJB series AC servo motor LECY□

                                                                  CAD
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                                                                  Starting from

                                                                  988.33 €

                                                                  *Unit price with basic configuration

                                                                  595.53 €

                                                                  *Unit price with basic configuration

                                                                  1,000.57 €

                                                                  *Unit price with basic configuration

                                                                  695.53 €

                                                                  *Unit price with basic configuration

                                                                  627.53 €

                                                                  Special price

                                                                  *Unit price with basic configuration

                                                                  Promotional pricing

                                                                  766.57 €

                                                                  *Unit price with basic configuration

                                                                  1,149.43 €

                                                                  *Unit price with basic configuration

                                                                  924.41 €

                                                                  *Unit price with basic configuration

                                                                  968.29 €

                                                                  Special price

                                                                  *Unit price with basic configuration

                                                                  Promotional pricing

                                                                  1,432.34 €

                                                                  *Unit price with basic configuration

                                                                  2,232.19 €

                                                                  *Unit price with basic configuration

                                                                  493.87 €

                                                                  *Unit price with basic configuration

                                                                  760.19 €

                                                                  *Unit price with basic configuration

                                                                  1,348.27 €

                                                                  *Unit price with basic configuration

                                                                  278.34 €

                                                                  *Unit price with basic configuration

                                                                  1,932.06 €

                                                                  *Unit price with basic configuration

                                                                  2,562.24 €

                                                                  *Unit price with basic configuration

                                                                  598.76 €

                                                                  *Unit price with basic configuration

                                                                  522.24 €

                                                                  *Unit price with basic configuration

                                                                  1,995.80 €

                                                                  *Unit price with basic configuration

                                                                  520.43 €

                                                                  *Unit price with basic configuration

                                                                  1,094.31 €

                                                                  *Unit price with basic configuration

                                                                  1,319.73 €

                                                                  *Unit price with basic configuration

                                                                  380.90 €

                                                                  *Unit price with basic configuration

                                                                  1,209.41 €

                                                                  *Unit price with basic configuration

                                                                  2,740.10 €

                                                                  *Unit price with basic configuration

                                                                  679.23 €

                                                                  *Unit price with basic configuration

                                                                  1,130.74 €

                                                                  *Unit price with basic configuration

                                                                  1,213.06 €

                                                                  *Unit price with basic configuration

                                                                  1,570.63 €

                                                                  *Unit price with basic configuration

                                                                  918.92 €

                                                                  *Unit price with basic configuration

                                                                  2,538.34 €

                                                                  *Unit price with basic configuration

                                                                  1,513.19 €

                                                                  *Unit price with basic configuration

                                                                  2,392.26 €

                                                                  *Unit price with basic configuration

                                                                  Min. Shipping Days : 4 Days 7 Days 26 Days 8 Days 15 Days 7 Days 26 Days 4 Days Same day 26 Days 26 Days 15 Days 7 Days 26 Days 26 Days 26 Days 26 Days 15 Days 17 Days 26 Days 26 Days 26 Days 26 Days 26 Days 26 Days 26 Days 26 Days 26 Days 26 Days 26 Days 26 Days 26 Days 26 Days 26 Days
                                                                  Main Body, Peripheral ComponentsMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain Body
                                                                  TypeSlidersRodsRodsSlidersSlidersRodsSlidersSlidersSlidersSlidersSlidersRodsRodsSlidersRodsSlidersSlidersSlidersSlidersSlidersSlidersSlidersSlidersRodsSlidersSlidersSlidersRodsRodsRodsSlidersSlidersSlidersSliders
                                                                  Stroke(mm)1,000 ~ 95030 ~ 50030 ~ 50050 ~ 15030 ~ 15030 ~ 3001,000 ~ 30001,000 ~ 9001,000 ~ 9501,000 ~ 9501,000 ~ 300025 ~ 7530 ~ 3001,000 ~ 90010 ~ 2001,000 ~ 9001,000 ~ 90025 ~ 5010 ~ 501,000 ~ 30001,000 ~ 9001,000 ~ 17001,000 ~ 140025 ~ 2001,000 ~ 30001,000 ~ 9001,000 ~ 1700100 ~ 25030 ~ 30050 ~ 3001,000 ~ 8501,000 ~ 8001,000 ~ 9001,000 ~ 3000
                                                                  Max. Transportable Mass Range (Horizontal)(kg)2.1 to 5.0 / 5.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.0 / 50.1 to 100.02.1 to 5.0 / 5.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.0 / 50.1 to 100.010.1 to 20.0 / 20.1 to 50.0 / 50.1 to 100.00 to 2.0 / 2.1 to 5.0 / 5.1 to 10.0 / 10.1 to 20.00 to 2.0 / 2.1 to 5.010.1 to 20.0 / 20.1 to 50.0 / 50.1 to 100.02.1 to 5.0 / 10.1 to 20.0 / 20.1 to 50.00 to 2.0 / 2.1 to 5.0 / 5.1 to 10.0 / 10.1 to 20.05.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.0 / 50.1 to 100.05.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.0 / 50.1 to 100.05.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.00 to 2.0 / 2.1 to 5.0 / 5.1 to 10.02.1 to 5.0 / 5.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.0 / 50.1 to 100.010.1 to 20.0 / 20.1 to 50.0 / 50.1 to 100.02.1 to 5.0 / 5.1 to 10.0 / 10.1 to 20.010.1 to 20.0 / 20.1 to 50.0 / 50.1 to 100.010.1 to 20.0 / 20.1 to 50.0 / 50.1 to 100.00 to 2.00 to 2.02.1 to 5.0 / 10.1 to 20.0 / 20.1 to 50.02.1 to 5.05.1 to 10.0 / 10.1 to 20.05.1 to 10.0 / 10.1 to 20.02.1 to 5.0 / 5.1 to 10.0 / 10.1 to 20.02.1 to 5.0 / 10.1 to 20.0 / 20.1 to 50.010.1 to 20.0 / 20.1 to 50.0 / 50.1 to 100.05.1 to 10.0 / 10.1 to 20.020.1 to 50.010.1 to 20.0 / 20.1 to 50.0 / 50.1 to 100.010.1 to 20.0 / 20.1 to 50.0 / 50.1 to 100.05.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.0 / 50.1 to 100.020.1 to 50.0 / 50.1 to 100.05.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.0 / 50.1 to 100.05.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.0
                                                                  Max. Transportable Mass (Horizontal)(kg)5 ~ 653 ~ 9018 ~ 601 ~ 121 ~ 518 ~ 605 ~ 251 ~ 1910 ~ 6010 ~ 6010 ~ 301 ~ 63 ~ 9020 ~ 602.4 ~ 2015 ~ 8515 ~ 850.75 ~ 215 ~ 253 ~ 510 ~ 2010 ~ 202.4 ~ 205 ~ 2515 ~ 856 ~ 113018 ~ 6018 ~ 609 ~ 6530 ~ 8510 ~ 6010 ~ 30
                                                                  Max. Transportable Mass Range (Vertical)(kg)0 to 2.0 / 2.1 to 5.0 / 5.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.00 to 2.0 / 2.1 to 5.0 / 5.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.0 / 50.1 to 100.05.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.00 to 2.0 / 2.1 to 5.00 to 2.0 / 2.1 to 5.05.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.0--2.1 to 5.0 / 5.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.02.1 to 5.0 / 5.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.0-0 to 2.00 to 2.0 / 2.1 to 5.0 / 5.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.0 / 50.1 to 100.05.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.0-2.1 to 5.0 / 5.1 to 10.0 / 10.1 to 20.02.1 to 5.0 / 5.1 to 10.0 / 10.1 to 20.00 to 2.00 to 2.0------2.1 to 5.0 / 5.1 to 10.0 / 10.1 to 20.0-5.1 to 10.05.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.05.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.00 to 2.0 / 2.1 to 5.0 / 5.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.02.1 to 5.0 / 5.1 to 10.0 / 10.1 to 20.02.1 to 5.0 / 5.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.0-
                                                                  Max. Transportable Mass (Vertical)(kg)0.5 ~ 232 ~ 538 ~ 460.25 ~ 40.25 ~ 57 ~ 44--4 ~ 304 ~ 30-0.25 ~ 1.51.5 ~ 518 ~ 30-3 ~ 203 ~ 200.25 ~ 1.50.05 ~ Not vertical------3 ~ 20-77 ~ 447 ~ 442 ~ 235 ~ 204 ~ 30-
                                                                  Drive MethodRolled Ball ScrewRolled Ball ScrewRolled Ball ScrewSlide ScrewsSlide ScrewsRolled Ball ScrewBeltsBeltsRolled Ball ScrewRolled Ball ScrewBeltsSlide ScrewsRolled Ball ScrewRolled Ball ScrewSlide ScrewsRolled Ball ScrewRolled Ball ScrewRolled Ball ScrewLinear MotorBeltsBeltsBeltsBeltsRolled Ball ScrewBeltsRolled Ball ScrewBeltsRolled Ball ScrewRolled Ball ScrewRolled Ball ScrewRolled Ball ScrewRolled Ball ScrewRolled Ball ScrewBelts
                                                                  GuideProvidedNot ProvidedNot ProvidedProvidedProvidedProvidedProvidedProvidedProvidedProvidedProvidedProvidedProvidedProvidedNot ProvidedProvidedProvidedProvidedProvidedProvidedProvidedProvidedProvidedNot ProvidedProvidedProvidedProvidedNot ProvidedProvidedProvidedProvidedProvidedProvidedProvided
                                                                  Lead(mm)5 ~ 302.5 ~ 163 ~ 204 ~ 164 ~ 163 ~ 2054 equivalent48 ~ Equivalent to 486 ~ 306 ~ 3027 ~ 424 ~ 102.5 ~ 166 ~ 202 ~ 128 ~ 308 ~ 304 ~ 10-54 equivalentEquivalent to 48Equivalent to 48Equivalent to 482 ~ 1254 equivalent8 ~ 30Equivalent to 48123 ~ 204 ~ 125 ~ 208 ~ 206 ~ 3027 ~ 42
                                                                  Input Power Supply24 V DC24 V DC-24 V DC24 V DC--24 V DC---24 V DC24 V DC-24 V DC--24 V DC24 V DC-24 V DC24 V DC24 V DC24 V DC--24 V DC24 V DC--24 V DC---
                                                                  Position DetectionIncrementalIncrementalIncremental / AbsoluteIncrementalIncremental--IncrementalIncrementalIncremental / AbsoluteIncremental / AbsoluteIncrementalIncrementalIncremental / Absolute--Incremental / AbsoluteIncrementalIncrementalAbsoluteIncrementalIncrementalIncremental-Incremental / AbsoluteAbsoluteIncrementalIncrementalIncremental / AbsoluteAbsoluteIncrementalIncremental / AbsoluteAbsoluteAbsolute
                                                                  I/O ModuleNPN / PNP / DeviceNet / Ethernet / Not Provided / EtherCAT / IO-Link / PROFINETNPN / PNP / DeviceNet / Ethernet / Not Provided / EtherCAT / IO-Link / PROFINET-NPN / PNP / DeviceNet / Ethernet / Not Provided / EtherCAT / IO-Link / PROFINETNPN / PNP / DeviceNet / Ethernet / Not Provided / EtherCAT / PROFINET--NPN / PNP / DeviceNet / Ethernet / Not Provided / EtherCAT / IO-Link / PROFINET---NPN / PNP / Ethernet / Not Provided / EtherCAT / PROFINETNPN / PNP / DeviceNet / Ethernet / Not Provided / EtherCAT / PROFINET-NPN / PNP / Not Provided--NPN / PNP / Ethernet / Not Provided / EtherCAT / PROFINETNPN / PNP / Not Provided-NPN / PNP / Ethernet / Not Provided / EtherCAT / PROFINETNPN / PNP / Ethernet / Not Provided / PROFINETNPN / PNP / Ethernet / Not Provided / EtherCAT / PROFINETNPN / PNP / Not Provided--NPN / PNP / Ethernet / Not Provided / EtherCAT / PROFINETPNP / Not Provided--NPN / PNP / Ethernet / Not Provided / EtherCAT / PROFINET---
                                                                  Table Width W1(mm)39.4 ~ 74--32 ~ 6132.2 ~ 60-50 ~ 7439.4 ~ 6050 ~ 7450 ~ 74105 ~ 129--50 ~ 74-105 ~ 129105 ~ 12919 ~ 244950 ~ 745672.4 ~ 108.750.4 ~ 124.7-50 ~ 74105 ~ 12961---39.4 ~ 74105 ~ 12950 ~ 74105 ~ 129
                                                                  BrakeNot Provided / ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / ProvidedNot ProvidedNot ProvidedNot Provided / ProvidedNot ProvidedNot Provided / ProvidedNot Provided / ProvidedNot ProvidedNot Provided / ProvidedNot Provided / ProvidedNot ProvidedNot ProvidedNot Provided / ProvidedNot ProvidedNot ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / ProvidedNot ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / Provided
                                                                  Max. Thrust Force Range(N)0 to 100 / 101 to 200 / 201 to 300 / 301 to 500 / 501 to 10000 to 100 / 101 to 200 / 201 to 300 / 301 to 500 / 501 to 1000 / 1,001 or More101 to 200 / 201 to 300 / 301 to 500 / 501 to 10000 to 100 / 101 to 2000 to 100 / 101 to 200101 to 200 / 201 to 300 / 301 to 500 / 501 to 10000 to 100 / 101 to 200 / 201 to 300-0 to 100 / 101 to 200 / 201 to 300 / 301 to 500 / 501 to 10000 to 100 / 101 to 200 / 201 to 300 / 301 to 500 / 501 to 10000 to 100 / 101 to 200 / 201 to 3000 to 1000 to 100 / 101 to 200 / 201 to 300 / 301 to 500 / 501 to 1000 / 1,001 or More101 to 200 / 301 to 500 / 501 to 10000 to 100 / 101 to 200101 to 200 / 201 to 300 / 301 to 500 / 501 to 1000101 to 200 / 201 to 300 / 301 to 500 / 501 to 10000 to 1000 to 1000 to 100 / 101 to 200 / 201 to 3000 to 1000 to 100 / 101 to 2000 to 100 / 101 to 2000 to 100 / 101 to 2000 to 100 / 101 to 200 / 201 to 300101 to 200 / 201 to 300 / 301 to 500 / 501 to 10000 to 100 / 101 to 200101 to 200101 to 200 / 201 to 300 / 301 to 500 / 501 to 1000101 to 200 / 301 to 500 / 501 to 10000 to 100 / 101 to 200 / 201 to 300 / 301 to 500 / 501 to 1000201 to 300 / 301 to 500 / 501 to 10000 to 100 / 101 to 200 / 201 to 300 / 301 to 500 / 501 to 10000 to 100 / 101 to 200 / 201 to 300
                                                                  Max. Thrust Force(N)49 ~ 63730 ~ 1058131 ~ 7367.5 ~ 1807.5 ~ 180131 ~ 73649 ~ 245-98 ~ 58898 ~ 58898 ~ 29410 ~ 5030 ~ 1058196 ~ 58824 ~ 196147 ~ 833147 ~ 83310 ~ 502.5 ~ 649 ~ 24529.4 ~ 4998 ~ 19698 ~ 19624 ~ 19649 ~ 245147 ~ 83358.8 ~ 107.8122131 ~ 736131 ~ 73688.2 ~ 637294 ~ 83398 ~ 58898 ~ 294
                                                                  Noise FiltersNot Provided / ProvidedNot ProvidedNot ProvidedNot ProvidedNot ProvidedNot ProvidedNot ProvidedNot ProvidedNot ProvidedNot ProvidedNot ProvidedNot ProvidedNot ProvidedNot ProvidedNot ProvidedNot ProvidedNot ProvidedNot ProvidedNot ProvidedNot ProvidedNot ProvidedNot ProvidedNot ProvidedNot ProvidedNot ProvidedNot ProvidedNot ProvidedNot ProvidedNot ProvidedNot ProvidedNot ProvidedNot ProvidedNot ProvidedNot Provided
                                                                  Table Length L1(mm)72 ~ 170--111 ~ 28588.5 ~ 316.5-102 ~ 17072 ~ 122102 ~ 170102 ~ 170160 ~ 172--102 ~ 170-160 ~ 172160 ~ 17276.4 ~ 113.260 ~ 150102 ~ 17064 ~ 8270 ~ 10070 ~ 100-102 ~ 170160 ~ 17278---72 ~ 170160 ~ 172102 ~ 170160 ~ 172
                                                                  Usage EnvironmentStandardStandardStandardStandardStandardStandardStandardStandardStandardStandardStandardStandardStandardStandardStandardStandardStandardStandardStandardStandardStandardStandardStandardStandardStandardStandardStandardStandardStandardStandardStandardStandardStandardStandard
                                                                  Positioning Repeatability(µm)±15 ~ ±20±20±10 ~ ±20±50±50±10 ~ ±20±60±80±10 ~ ±20±10 ~ ±20±40±50±20±20-±10 ~ ±20±10 ~ ±20±50±5 ~ ±90±60±80±80±80-±60±10 ~ ±20±80±20±10 ~ ±20±20±15 ~ ±20±10 ~ ±20±10 ~ ±20±40
                                                                  Maximum Velocity(mm/sec)1,000 ~ 110075 ~ 5001,000 ~ 1000150 ~ 400200 ~ 4001,000 ~ 90020001,500 ~ 20001,000 ~ 9401,000 ~ 15002000 ~ 3000150 ~ 35075 ~ 5001,000 ~ 94033 ~ 2001,200 ~ 18001,200 ~ 1800150 ~ 35040020001,000 ~ 5001,000200033 ~ 20020001,200 ~ 18001,0004001,000 ~ 9001,000 ~ 900250 ~ 5001,200 ~ 6001,000 ~ 9402000 ~ 3000

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