Vacuum Pad Suction Mark Prevention Type VPA One Touch Fitting Type

* The CAD data for this series is being revised. This will be available as soon as modifications are complete.

[Features]
· Ideal for LCD glass, coating processes, and transport of semiconductor manufacturing equipment.
· The flexible resin material adheres to work.
· Unlikely to make adhesion marks.
· Also, the characteristic separation in a workpiece at the time of vacuum breakage will increase.
· You can replace the resin pad without spanners and hexagon wrenches to detach the main body.
· Simple and compact structure.
· A wide range of pad sizes, pad materials, and holder shapes are available.
· Pad holders were added to applications with "copper-based metal not used" and "reduce ozone concentrations” requirements.
· Copper-based metal is not used for metal parts. HNBR is used for sealing rubber material.

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Product specification
Part Numbers
Catalog

Dimensions

Standard table

Model code	Pad O.D. ød	Tube O.D. øD	Thread M	B	L	Tube end C	Hex. H1	Hex. H2	Connection config. code
VPA10Q[5]-6J[9]	10	6	M12×1	40	18	11.7	14	12	-M4
VPA20Q[5]-3J	20	3	M12×1	50.6	19.9	10.9	14	12	-M6
VPA20Q[5]-4J[9]		4	M12×1	50.6	19.9	10.9	14	12
VPA20Q[5]-6J[9]		6	M14×1	41.6	19.5	11.7	17	14
VPA30Q[5]-3J	30	3	M12×1	50.6	19.9	10.9	14	12
VPA30Q[5]-4J[9]		4	M12×1	50.6	19.9	10.9	14	12
VPA30Q[5]-6J[9]		6	M14×1	41.6	19.5	11.7	17	14

Units: mm

*[5]: Replaced with Pad rubber material code. Refer to the catalog for details.
*[9]: Replaced with "-S3" for -S3 spec. (Copper alloy free material for metal parts and FKM or HNBR for sealing parts).
*Tightening torque of a pad holder fixing bulkhead nut is as below.
▪Pad dia.: ø10 mm ▶ 12~14 N·m. ø20~30 mm ▶ 18~21 N·m

Data to be displayed: 30; 45; 60

Part Number
VPA10QM-6J
VPA20QM-6J
VPA30QM-6J

Standard Unit Price	Minimum order quantity	Standard Shipping Days ?	Resin Group Material	Usage Environment	Color	Outer Diameter D (φ)	Full length B (mm)	Mount Connection Screw	Fall Prevention Valve
60.92 €	1	10 Days	POM	Standard	[White] White	10	40.1	M12	None
70.54 €	1	10 Days	POM	Standard	[White] White	20	41.6	M14	None
79.71 €	1	10 Days	POM	Standard	[White] White	30	41.6	M14	None

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Basic information

Pad type	Standard / Holder Set	Pad Type	Prevention of Adsorption Trace	Mounting Method	Pad Screw Fixed
Material	Resin	Height L1(mm)	5.3	Mounting Bracket	Fixed Type
Stroke(mm)	1	Vacuum Outlet Direction	Top	Vacuum Outlet Tube Outer Diameter(φ)	6
Direct Attached Filter	None	Metal parts material	Standard Specifications	Swiveling angle	16°