Model code | Tube I.D. øD | Pad O.D. ød | Thread M | B | L | C | Hex. H | Connection config. code |
---|---|---|---|---|---|---|---|---|
VPMA0.7RM[5]-3B[9] | 2 | 0.7 | M4×0.5 | 18 | 4 | 6 | 6 | -T4 |
VPMA0.7RM[5]-4B[9] | 2.5 | M5×0.5 | 19 | 7 | 7 | |||
VPMA1RM[5]-3B[9] | 2 | 1 | M4×0.5 | 18 | 6 | 6 | ||
VPMA1RM[5]-4B[9] | 2.5 | M5×0.5 | 19 | 7 | 7 | |||
VPMA1.5RM[5]-3B[9] | 2 | 1.5 | M4×0.5 | 18 | 6 | 6 | ||
VPMA1.5RM[5]-4B[9] | 2.5 | M5×0.5 | 19 | 7 | 7 | |||
VPMA2RM[5]-3B[9] | 2 | 2 | M4×0.5 | 18 | 6 | 6 | ||
VPMA2RM[5]-4B[9] | 2.5 | M5×0.5 | 19 | 7 | 7 | |||
VPMA3RM[5]-3B[9] | 2 | 3 | M4×0.5 | 18 | 6 | 6 | ||
VPMA3RM[5]-4B[9] | 2.5 | M5×0.5 | 19 | 7 | 7 | |||
VPMA4RM[5]-3B[9] | 2 | 4 | M4×0.5 | 18 | 6 | 6 | ||
VPMA4RM[5]-4B[9] | 2.5 | M5×0.5 | 19 | 7 | 7 | |||
VPMA6R[5]-3B[9] | 2 | 6 | M4×0.5 | 23 | 7 | 6 | 6 | -T8 |
VPMA6R[5]-4B[9] | 2.5 | M5×0.5 | 24 | 7 | ||||
VPMA8R[5]-3B[9] | 2 | 8 | M4×0.5 | 21.5 | 5.5 | 6 | ||
VPMA8R[5]-4B[9] | 2.5 | M5×0.5 | 22.5 | 7 | ||||
VPMA10R[5]-3B[9] | 2 | 10 | M6×0.75 | 28 | 8 | 6 | 8 | -M4 |
VPMA10R[5]-4B[9] | 2.5 | 29 | 7 | |||||
VPMA15R(A)[5]-3B[9] | 2 | 15 | 29(30) | 9(10) | 6 | |||
VPMA15R(A)[5]-4B[9] | 2.5 | 30(31) | 7 | |||||
VPMA20R(A)[5]-4B[9] | 2.5 | 20 | M10×1 | 36.6(37.6) | 10(11) | 7 | 12 | -M6 |
VPMA20R(A)[5]-6B[9] | 4 | |||||||
VPMA25R(A)[5]-4B[9] | 2.5 | 25 | 37.6(38.6) | 11(12) | ||||
VPMA25R(A)[5]-6B[9] | 4 | |||||||
VPMA30R(A)[5]-4B[9] | 2.5 | 30 | 37.6(40.6) | 11(14) | ||||
VPMA30R(A)[5]-6B[9] | 4 | |||||||
VPMA40R(A)[5]-4B[9] | 2.5 | 40 | 40.6(44.1) | 14(17.5) | ||||
VPMA40R(A)[5]-6B[9] | 4 | |||||||
VPMA50R(A)[5]-4B[9] | 2.5 | 50 | 41.6(44.6) | 15(18) | ||||
VPMA50R(A)[5]-6B[9] | 4 |
Units: mm
*Value in ( ) is the dimension of a deep type pad.
*[5]: Replaced with Pad rubber material code. Refer to the catalog for details.
*[9]: Replaced with "-S3" for -S3 spec. (Copper alloy free material for metal parts and FKM or HNBR for sealing parts).
*Pad material N, NE, and G are not suitable for use under ozone environment.
*Tightening torque of a pad holder fixing bulkhead nut is as below.
▪Pad dia.: ø0.7~ø8 mm: Thread size M4×0.5 ▶ 1~1.2 N·m, M5×0.5 ▶ 1.5~2 N·m.
▪Pad dia.: ø10, ø15 mm ▶ 2~3 N·m.
▪Pad dia.: ø20~ø50 mm ▶ 5~7 N·m
Small vacuum pad ideal for use in semiconductor manufacturing equipment. *CAD data currently being revised for this series. This will be available as soon as modifications are complete.
[Features]
· Containers of different shapes are available, including the general type which is ideal for flat work surfaces (ones that are rigid enough not to flap), the deep type ideal for round fruits (apples, etc.) and balls, and the small type ideal for small works and for use at semiconductor manufacturing facilities.
· A wide range of pad sizes, pad materials, and holder shapes are available.
· Pad holders have been added for applications requiring copper-based metal not to be used and as part of efforts to reduce ozone concentrations.
· Copper-based metal is not used for metal parts. HNBR is used for sealing rubber material.